This thesis constitutes a detailed study of functional nanostructures (ferromagnetic, superconducting, metallic and semiconducting) fabricated by focused electron/ion beam induced deposition techniques. The nanostructures were grown using different precursor materials such as Co2(CO)8, Fe2(CO)9, W(CO)6, (CH3)3Pt(CpCH3) and were characterized by a wide range of techniques. This work reports results obtained for the morphology, the microstructure, the composition, the electrical transport mechanism, magnetic and superconducting properties of nanostructures. The results offers exciting prospects in a wide range of applications in nanotechnology and condensed matter physics.

Introduction.- Experimental Techniques.- Ferromagnetic Cobalt Nanostructures grown by Focused Electron Beam Induced Deposition.- Ferromagnetic Iron Nanostructures grown by Focused Electron Beam Induced Deposition.- Superconducting Tungsten-Based Nanodeposits grown by Focused Ion Beam Induced Deposition.- Summary and Main Conclusions.