Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials. Topics included: * techniques for compound semiconductor growth * metalorganic precursors for III-V MOVPE * metalorganic precursors for II-VI MOVPE * single-source precursors * chemical beam epitaxy * atomic layer epitaxy Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.

Basic Electronics Introduction to Vapor-Phase Epitaxy MOCVD ALE CBE Precursor Chemistry General Classes Synthesis/Purification Effects of Trace Impurities on Layer Properties Deposition of III-V Semiconductors MOCVD ALE CBE Deposition of II-VI Semiconductors MOCVD ALE Future Prospects